69-77

UDC 621.383.51
DOI: 10.15350/2306-2819.2017.3.69

FORMATION AND STUDY OF THIN-FILM STRUCTURES BASED ON COPPER OXIDE AND ZINC OXIDE, OBTAINED BY A REACTION MAGNETRON SPUTTERING TECHNIQUE FOR APPLYING IN SOLAR POWER ENGINEERING

D. E. Shashin, S. A. Stepanov, N. I. Sushentsov
Volga State University of Technology,
3, Lenin Square, Yoshkar-Ola, 424000, Russian Federation
E-mail: SushentsovNI@volgatech.net; ShashinDE@volgatech.net

ABSTRACT

Introduction. In recent years, new ideas, connected with designing photoelectric converters (PEC), based on film systems on the basis of oxide structures have been developed rapidly. Much has been written on the research into these systems. Oxide structures are perspective for PEC due to a relatively simple production technology, low cost, the prevalence on the Earth and a relatively high coefficient of sunlight spectral absorption. Zinc oxide (ZnO) and cuprous oxide (CuO) are the most suitable ones for the creation of such structures. Because of the high film coating rate and the sputtered material composition reproduction accuracy, the magnetron sputtering method is the most promising technique of metal-oxide structure formation. The purpose of the work is the formation and study of thin-film structures based on cuprous oxide and zinc oxide by the magnetron sputtering method. Results. Structures p-CuO/n-ZnO, obtained by the reaction magnetron sputtering method were studied. It became clear that conventional and vacuum thermal annealing have a considerably different effect on current-voltage characteristics of obtained structures. After vacuum annealing, structures n-ZnO/p-CuO have noticeable sensitivity to visible light. Conclusion. When developing PEC based on thin-film structures, there are problems, connected with the growing influence of the interface and foreign inclusions (defects) on these structures characteristics. The possible problem of obtained sample low efficiency is the diffusion of boron from p-ZnO, as well as the imperfection of the crystal structure of the samples. To solve this problem during further research, structures n-ZnO/CuO will be obtained, where ZnO, alloyed by aluminum, will be used in the structure as a p-semiconductor. It is necessary to choose the suitable type of the structure, layers succession and their thickness for the possibility of the use as PEC. Further integrated study to meet contradictory conditions at the СuO/ZnO structures formation stage is required.

KEYWORDS

solar power engineering; photoelectron transformation; copper oxide; zinc oxide; magnetron sputtering; thin films

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For citation: Shashin D.E., Stepanov S.A., Sushentsov N.I. Formation and Study of Thin-Film Structures Based on Copper Oxide and Zinc Oxide, Obtained by a Reaction Magnetron Sputtering Technique for Applying in Solar Power Engineering. Vestnik of Volga State University of Technology. Ser.: Radio Engineering and Infocommunication Systems. 2017. No 3 (35). Pp. 69-77. DOI: 10.15350/2306-2819.2017.3.69